Thomson scattering measurements of electron temperature and density in an electron cyclotron resonance plasma.

Authors :: Bowden, M. D.
Okamoto, T.
Kimura, F.
Muta, H.
Uchino, K.
Muraoka, K.
Sakoda, T.
Maeda, M.
Manabe, Y.
Kitagawa, M.
Kimura, T.
Source :: Journal of Applied Physics. 3/15/1993, Vol. 73 Issue 6, p2732. 7p. 2 Diagrams, 6 Graphs.
Publication Year :: 1993
Abstract: Presents a study that determined the measurements of electron temperature and density in an electron cyclotron resonance (ECR) plasma which were obtained using the technique of incoherent Thomson scattering of a high-power pulsed laser. Background on the use of ECR plasmas in plasma processing applications; Examples of typical Thomson scattered signals; Analysis of deviations from a Maxwellian velocity distribution.

Subjects :: *ELECTRON cyclotron resonance sources
*SCATTERING (Physics)
*ELECTRONS

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