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Fundamental and practical aspects of reactive N+2-ion sputtering in Auger in-depth analysis.
- Source :
-
Journal of Applied Physics . 3/15/1991, Vol. 69 Issue 6, p3723. 6p. - Publication Year :
- 1991
-
Abstract
- Presents information on a study which systematically depth profiled polycrystalline aluminum, molybdenum, and titanium films deposited on silicon wafers by Auger electron spectroscopy using argon and nitrogen ions as projectile. Methodology of the study; Results and discussion; Conclusions.
- Subjects :
- *POLYCRYSTALS
*METALLIC films
*ALUMINUM
*MOLYBDENUM
*TITANIUM
Subjects
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 69
- Issue :
- 6
- Database :
- Academic Search Index
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- 7633938
- Full Text :
- https://doi.org/10.1063/1.348465