X-ray analysis of strain relaxation in strained-layer superlattices.

Presents a study which performed theoretical simulations of x-ray double-crystal diffraction rocking curves for strain-relaxed superlattices based on x-ray dynamical diffraction theory. Details on calculations of rocking curves; Description of the model structure used for the calculation; Method used in preparing InGaAs, gallium arsenide, GeSi and silicon superlattices.