Surface-energy-driven grain growth during rapid thermal annealing (<10 s) of thin silicon films.

Authors :: Garrison, S. M.
Cammarata, R. C.
Thompson, C. V.
Smith, Henry I.
Source :: Journal of Applied Physics. 2/15/1987, Vol. 61 Issue 4, p1652. 4p. 1 Black and White Photograph, 2 Graphs.
Publication Year :: 1987
Abstract: Examines the initial kinetics of surface-energy-driven grain growth (SEDGG) in silicon that occurred during rapid thermal annealing. Description of the SEDGG; Fraction of the area of a thin film transformed to secondary grains; Definition of extended fraction.

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