Relationship between the stress and bonding properties of amorphous SiNx:H films.

MLA

Hasegawa, S., et al. “Relationship between the Stress and Bonding Properties of Amorphous SiNx:H Films.” Journal of Applied Physics, vol. 72, no. 12, Dec. 1992, p. 5676. EBSCOhost, https://doi.org/10.1063/1.351917.

APA

Hasegawa, S., Amano, Y., Inokuma, T., & Kurata, Y. (1992). Relationship between the stress and bonding properties of amorphous SiNx:H films. Journal of Applied Physics, 72(12), 5676. https://doi.org/10.1063/1.351917

Chicago

Hasegawa, S., Y. Amano, T. Inokuma, and Y. Kurata. 1992. “Relationship between the Stress and Bonding Properties of Amorphous SiNx:H Films.” Journal of Applied Physics 72 (12): 5676. doi:10.1063/1.351917.