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Angular distributions of sputtered zirconium atoms.
- Source :
-
Journal of Chemical Physics . 4/1/1993, Vol. 98 Issue 7, p5887. 12p. - Publication Year :
- 1993
-
Abstract
- Ion beams with energies in the range 1–2 keV are used to sputter neutral Zr atoms from a polycrystalline surface. Laser induced fluorescence detection is used to obtain angular distributions of sputtered neutrals as a function of ion impact direction, ion mass, ion energy, and spin–orbit state of the exiting atoms. About 40% of the sputtered atoms are excited. Angular distributions depend weakly on ion mass and energy. The angular distributions are fitted well by a modified form of the Roosendaal and Saunders model of sputtering. [ABSTRACT FROM AUTHOR]
- Subjects :
- *ION bombardment
*ANGULAR distribution (Nuclear physics)
*SPUTTERING (Physics)
Subjects
Details
- Language :
- English
- ISSN :
- 00219606
- Volume :
- 98
- Issue :
- 7
- Database :
- Academic Search Index
- Journal :
- Journal of Chemical Physics
- Publication Type :
- Academic Journal
- Accession number :
- 7609802
- Full Text :
- https://doi.org/10.1063/1.464880