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An Efficient DIPIE Algorithm for CAD of Electrostatically Actuated MEMS Devices.
- Source :
-
Journal of Microelectromechanical Systems . Oct2002, Vol. 11 Issue 5, p612. 9p. 4 Diagrams, 8 Graphs. - Publication Year :
- 2002
-
Abstract
- Presents an algorithm for extracting the Pull-In parameters of general electrostatic actuators. Consistency of the displacement iteration Pull-In extraction scheme; Importance of mechanical and electrostatic field solvers; Performance of Pull-In parameters extraction in automated mode.
- Subjects :
- *ACTUATORS
*ALGORITHMS
*ELECTROSTATICS
Subjects
Details
- Language :
- English
- ISSN :
- 10577157
- Volume :
- 11
- Issue :
- 5
- Database :
- Academic Search Index
- Journal :
- Journal of Microelectromechanical Systems
- Publication Type :
- Academic Journal
- Accession number :
- 7571220
- Full Text :
- https://doi.org/10.1109/JMEMS.2002.803280