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Resistive switching characteristics of multilayered (HfO2/Al2O3)n n=19 thin film
- Source :
-
Thin Solid Films . Feb2012, Vol. 520 Issue 8, p3415-3418. 4p. - Publication Year :
- 2012
-
Abstract
- Abstract: A transparent resistive random access memory used as Indium Tin Oxide (ITO) electrode, ITO/HfO2/Al2O3/…/HfO2/Al2O3/ITO capacitor structure is fabricated on glass substrate by atomic layer deposition. The unipolar resistive switching characteristics can be performed by applying the positive- or negative-bias through top electrode, however, the differences of switching and stability in the two different operations can be observed. The diversities of electrical property are attributed to different oxide/ITO interface materials, which influence the current flow of the injected electrons. [Copyright &y& Elsevier]
Details
- Language :
- English
- ISSN :
- 00406090
- Volume :
- 520
- Issue :
- 8
- Database :
- Academic Search Index
- Journal :
- Thin Solid Films
- Publication Type :
- Academic Journal
- Accession number :
- 72695156
- Full Text :
- https://doi.org/10.1016/j.tsf.2011.10.118