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System-Level Applications Make MEMS Ubiquitous.
- Source :
-
Electronic Design . 1/12/2012, Vol. 60 Issue 1, p61-64. 4p. 4 Color Photographs, 1 Diagram. - Publication Year :
- 2012
-
Abstract
- The article reports that a system-level approach is exciting the technology of microelectromechanical system (MEMS) devices, which involves the integration of MEMS-based sensors, actuators and structures with functions, like processing and packaging. It mentions that MEMS accelerometers, gyroscopes and inertial management units (IMUs) are becoming smaller and sophisticated with better performance.
- Subjects :
- *TECHNOLOGY
*MICROELECTROMECHANICAL systems
*ACTUATORS
*ACCELEROMETERS
*DETECTORS
Subjects
Details
- Language :
- English
- ISSN :
- 00134872
- Volume :
- 60
- Issue :
- 1
- Database :
- Academic Search Index
- Journal :
- Electronic Design
- Publication Type :
- Periodical
- Accession number :
- 71694009