DECREASED REFRACTIVE INDEX OF NANOCRYSTALLINE ZIRCONIUM OXIDE THIN FILMS.

Amorphous zirconium oxide (a-ZrO2) thin films were prepared onto fuzzed quartz substrates by ion beam sputtering deposition (IBSD) method in (Ar +O2) gas mixture. Optical parameters of the films were evaluated by laser ellipsometry (λ = 632.8 nm) and optical transmission measurements. Structural parameters were studied by XRD measurements. Variation of refractive index and film thickness have been defined as a function of time of high-temperature annealing at T = 900°C. Formation of monoclinic zirconium oxide (m-ZrO2) nanocrystals with diameter of ~60 nm embedded into a-ZrO2 matrix has been found by XRD analysis after long-time annealing. [ABSTRACT FROM AUTHOR]