Rocking disc electro-deposition of copper films on Mo/MoSe2 substrates

Abstract: A novel electro-deposition method based on a rocking disc system with π/3 amplitude and variable frequency is introduced. Uniform copper films were deposited from a 0.1M CuSO4/3.0M NaOH/0.2M sorbitol bath directly onto 12.1cm2 Mo/MoSe2 substrates with X-ray diffraction showing a thickness variation of ±5% over this area. Investigation of the mass transport conditions suggests (i) uniform diffusion over the sample, (ii) a rate of mass transport proportional to the square root of the rocking rate, and (iii) turbulent conditions, which are able to dislodge gas bubbles during electro-deposition. [Copyright &y& Elsevier]