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Real-time x-ray scattering study on the thermal evolution of interface roughness in CoSi[sub2] formation.
- Source :
-
Applied Physics Letters . 2/25/2002, Vol. 80 Issue 8, p1361. 3p. 3 Graphs. - Publication Year :
- 2002
-
Abstract
- Examines the thermal evolution of interface roughness during cobalt silicide formation in the Co/Ti/Si(001) and Co/Si(001) systems. Use of real-time synchroton x-ray scattering measurement; Enhancement of the CoSi[sub 2]/Si(001) interface roughness; Suppression of the reaction between the cobalt overlayer and silicon substrate.
- Subjects :
- *SURFACE roughness
*COBALT
*SILICON
Subjects
Details
- Language :
- English
- ISSN :
- 00036951
- Volume :
- 80
- Issue :
- 8
- Database :
- Academic Search Index
- Journal :
- Applied Physics Letters
- Publication Type :
- Academic Journal
- Accession number :
- 6410960
- Full Text :
- https://doi.org/10.1063/1.1455149