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Fabrication of Hinged Mirrors Using a Strain-Driven Self-Assembly Method on a GaAs Substrate.
- Source :
-
Chinese Physics Letters . Jul2011, Vol. 28 Issue 7, p078102-078102. 1p. - Publication Year :
- 2011
-
Abstract
- Hinged mirror arrays are widely utilized for display applications and optical communication. They can be fabricated by an self-assembly technique using the strain in lattice-mismatched epitaxial layers. A multilayer structure including a strain-compensated layer, a digital alloy sacrificial layer and a strain bilayer, is grown by molecular-beam epitaxy. Self-assembly hinged mirrors on a GaAs substrate have been successfully fabricated by photolithography and selective etching. The hinge fabrication method with a strain bilayer is simple and flexible. Structures formed by multiple hinged plates will enable the self-assembly of more complex three-dimensional microstructures. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 0256307X
- Volume :
- 28
- Issue :
- 7
- Database :
- Academic Search Index
- Journal :
- Chinese Physics Letters
- Publication Type :
- Academic Journal
- Accession number :
- 63249260
- Full Text :
- https://doi.org/10.1088/0256-307X/28/7/078102