Tunable Interdigital Capacitors with Ba0.5Sr0.5TiO3 Thin Films on Low-k Substrates for Frequency Agile Microwave Devices.

A tunable interdigitated capacitor is developed using Ba0.5Sr0.5TiO3 ferroelectic thin film and low-k fused silica substrate for applications in the microwave frequency range. The capacitance and quality factor of tunable IDC structure on BST5 film as a function of frequency up to 5 GHz are extracted using the conformal mapping method and partial capacitance technique. In this paper, the tunable capacitance properties of Au/Ba0.5Sr0.5TiO3 thin-film interdigital capacitors on low-k substrates are presented. [ABSTRACT FROM AUTHOR]