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Nanoscale control of domain arrangements in Pb(Zr0.3,Ti0.7)O3 ferroelectric films

Authors :
Shen, Zhen-Kui
Lu, Qian
Chen, Zhi-Hui
Jiang, An-Quan
Qiu, Zhi-Jun
Qu, Xin-Ping
Chen, Yi-Fang
Liu, Ran
Source :
Microelectronic Engineering. Aug2011, Vol. 88 Issue 8, p2041-2044. 4p.
Publication Year :
2011

Abstract

Abstract: Arrays of ferroelectric PZT nanostructures with lateral size down to 500nm were fabricated using nanoembossing technique. The static distribution of domain configurations was investigated by Piezoresponse Force Microscopy (PFM). The observed presence of patterned domains following the patterned morphology suggests that nanoembossing could be used as a potential method for nanoscale control of domain arrangements in ferroelectrics nanostructures. [Copyright &y& Elsevier]

Details

Language :
English
ISSN :
01679317
Volume :
88
Issue :
8
Database :
Academic Search Index
Journal :
Microelectronic Engineering
Publication Type :
Academic Journal
Accession number :
62554129
Full Text :
https://doi.org/10.1016/j.mee.2010.12.101