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Simple Method for Extracting Effective Sheet Charge Density Along STI Sidewalls Due to Radiation.
- Source :
-
IEEE Transactions on Nuclear Science . Jun2011 Part 3, Vol. 58 Issue 3, p1332-1337. 6p. - Publication Year :
- 2011
-
Abstract
- A first order model of radiation induced narrow-channel effect (RINCE) is developed by applying charge conservation principle to calculate threshold voltage shift due to total ionizing dose (TID) irradiation. The model provides a way for extracting effective sheet charge density along shallow trench isolation (STI) sidewalls. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 00189499
- Volume :
- 58
- Issue :
- 3
- Database :
- Academic Search Index
- Journal :
- IEEE Transactions on Nuclear Science
- Publication Type :
- Academic Journal
- Accession number :
- 61254832
- Full Text :
- https://doi.org/10.1109/TNS.2011.2142323