Effects of physical growth conditions on the structural and optical properties of sputtered grown thin HfO2 films

MLA

Aygun, Gulnur, et al. “Effects of Physical Growth Conditions on the Structural and Optical Properties of Sputtered Grown Thin HfO2 Films.” Thin Solid Films, vol. 519, no. 17, June 2011, pp. 5820–25. EBSCOhost, https://doi.org/10.1016/j.tsf.2010.12.189.

APA

Aygun, G., Cantas, A., Simsek, Y., & Turan, R. (2011). Effects of physical growth conditions on the structural and optical properties of sputtered grown thin HfO2 films. Thin Solid Films, 519(17), 5820–5825. https://doi.org/10.1016/j.tsf.2010.12.189

Chicago

Aygun, Gulnur, Ayten Cantas, Yilmaz Simsek, and Rasit Turan. 2011. “Effects of Physical Growth Conditions on the Structural and Optical Properties of Sputtered Grown Thin HfO2 Films.” Thin Solid Films 519 (17): 5820–25. doi:10.1016/j.tsf.2010.12.189.