Size effect in micro-scale cantilever beam bending.

When the thickness of metallic cantilever beams reduces to the order of micron, a strong size effect of mechanical behavior has been found. In order to explain the size effect in a micro-cantilever beam, the couple-stress theory (Fleck and Hutchinson, J Mech Phys Solids 41:1825-1857, ) and the C-W strain gradient theory (Chen and Wang, Acta Mater 48:3997-4005, ) are used with the help of the Bernoulli-Euler beam model. The cantilever beam is considered as the linear elastic and rigid-plastic one, respectively. Analytical results of the cantilever beam deflection under strain gradient effects by applying these two kinds of theories are obtained, from which we find an explicit relationship between the intrinsic lengths introduced in the two kinds of theories. The theoretical results are further used to analyze the experimental observations, and predictions by both theories are further compared. The results in the present paper should be useful for the design of micro-cantilever beams in MEMS and NEMS. [ABSTRACT FROM AUTHOR]