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Nanometric patterning of zinc by optical near-field photochemical vapour deposition.

Authors :
Polonski
Yamamoto
Kourogi
Fukuda
Ohtsu
Polonski
Source :
Journal of Microscopy. May/Jun99, Vol. 194 Issue 2/3, p545-551. 7p. 2 Diagrams, 4 Graphs.
Publication Year :
1999

Abstract

A new technique, optical near-field photochemical vapour deposition (NFO-PCVD) enables maskless production of nanometric structures with controllable size, chemical composition and morphology. By placing a near-field optical microscope inside the reaction chamber for photochemical vapour deposition we have deposited nanoscale metal patterns. We demonstrate for the first time, successfully deposited in the near-field region, lines of metallic zinc with the observed stripe width of 20 nm. [ABSTRACT FROM AUTHOR]

Subjects

Subjects :
*ZINC
*NEAR-field microscopy

Details

Language :
English
ISSN :
00222720
Volume :
194
Issue :
2/3
Database :
Academic Search Index
Journal :
Journal of Microscopy
Publication Type :
Academic Journal
Accession number :
6008187
Full Text :
https://doi.org/10.1046/j.1365-2818.1999.00497.x