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A Survey of Modeling and Control Techniques for Micro- and Nanoelectromechanical Systems.
- Source :
-
IEEE Transactions on Systems, Man & Cybernetics: Part C - Applications & Reviews . 05/01/2011, Vol. 41 Issue 3, p350-364. 15p. 2 Color Photographs, 1 Black and White Photograph, 6 Diagrams, 1 Chart, 3 Graphs. - Publication Year :
- 2011
-
Abstract
- In the current times, microelectromechanical systems and nanoelectromechanical systems form a major interdisciplinary area of research involving science, engineering, and technology. A lot of work has been reported in the area of modeling and control of these devices, with the aim of better understanding their behavior and improving their performance. This paper presents a review of the emerging advances in the modeling and control of these micro- and nanoscale devices and converges on the exciting research in on-chip control , with a mechatronics and controls perspective and concludes by projecting future trends. [ABSTRACT FROM PUBLISHER]
Details
- Language :
- English
- ISSN :
- 10946977
- Volume :
- 41
- Issue :
- 3
- Database :
- Academic Search Index
- Journal :
- IEEE Transactions on Systems, Man & Cybernetics: Part C - Applications & Reviews
- Publication Type :
- Academic Journal
- Accession number :
- 59953945
- Full Text :
- https://doi.org/10.1109/TSMCC.2010.2072779