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Auto-calibration of capacitive MEMS accelerometers based on pull-in voltage.
- Source :
-
Microsystem Technologies . Mar2011, Vol. 17 Issue 3, p429-436. 8p. 3 Diagrams, 4 Charts, 2 Graphs. - Publication Year :
- 2011
-
Abstract
- This paper describes an electro-mechanical auto-calibration technique for use in capacitive MEMS accelerometers. Auto-calibration is achieved using the combined information derived from an initial measurement of the resonance frequency and the measurement of the pull-in voltages during device operation, with an estimation of process-induced variations in device dimensions from layout and deviations in material properties from the known nominal value. An experiment-based analytical model is used to compute the required electrostatic forces required to simulate external accelerations allowing the electro-mechanical calibration of the accelerometer. Measurements on fabricated devices confirm the validity of the proposed technique and electro-mechanical calibration is experimentally demonstrated. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 09467076
- Volume :
- 17
- Issue :
- 3
- Database :
- Academic Search Index
- Journal :
- Microsystem Technologies
- Publication Type :
- Academic Journal
- Accession number :
- 59904306
- Full Text :
- https://doi.org/10.1007/s00542-011-1252-8