Influence of PECVD parameters on the properties of diamond-like carbon films

MLA

Caschera, D., et al. “Influence of PECVD Parameters on the Properties of Diamond-like Carbon Films.” Thin Solid Films, vol. 519, no. 12, Apr. 2011, pp. 4087–91. EBSCOhost, https://doi.org/10.1016/j.tsf.2011.01.197.

APA

Caschera, D., Cossari, P., Federici, F., Kaciulis, S., Mezzi, A., Padeletti, G., & Trucchi, D. M. (2011). Influence of PECVD parameters on the properties of diamond-like carbon films. Thin Solid Films, 519(12), 4087–4091. https://doi.org/10.1016/j.tsf.2011.01.197

Chicago

Caschera, D., P. Cossari, F. Federici, S. Kaciulis, A. Mezzi, G. Padeletti, and D.M. Trucchi. 2011. “Influence of PECVD Parameters on the Properties of Diamond-like Carbon Films.” Thin Solid Films 519 (12): 4087–91. doi:10.1016/j.tsf.2011.01.197.