Mechanical behavior of TiN/CrN nano-multilayer thin film deposited by unbalanced magnetron sputter process

MLA

Sun, Pei-Ling, et al. “Mechanical Behavior of TiN/CrN Nano-Multilayer Thin Film Deposited by Unbalanced Magnetron Sputter Process.” Journal of Alloys & Compounds, vol. 509, no. 6, Feb. 2011, pp. 3197–201. EBSCOhost, https://doi.org/10.1016/j.jallcom.2010.12.057.

APA

Sun, P.-L., Su, C.-Y., Liou, T.-P., Hsu, C.-H., & Lin, C.-K. (2011). Mechanical behavior of TiN/CrN nano-multilayer thin film deposited by unbalanced magnetron sputter process. Journal of Alloys & Compounds, 509(6), 3197–3201. https://doi.org/10.1016/j.jallcom.2010.12.057

Chicago

Sun, Pei-Ling, Cherng-Yuh Su, Tai-Pin Liou, Cheng-Hsun Hsu, and Chung-Kwei Lin. 2011. “Mechanical Behavior of TiN/CrN Nano-Multilayer Thin Film Deposited by Unbalanced Magnetron Sputter Process.” Journal of Alloys & Compounds 509 (6): 3197–3201. doi:10.1016/j.jallcom.2010.12.057.