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Grain orientation measurement of passivated aluminum interconnects by x-ray micro diffraction.
- Source :
-
AIP Conference Proceedings . 2000, Vol. 507 Issue 1, p284. 4p. - Publication Year :
- 2000
-
Abstract
- The crystallographic orientations of individual grains in a passivated aluminum interconnect line of 0.7-μm width were investigated by using an incident white x-ray microbeam at the Advanced Light Source, Berkeley National Laboratory. Intergrain orientation mapping was obtained with about 0.05° sensitivity by the micro Laue diffraction technique. [ABSTRACT FROM AUTHOR]
- Subjects :
- *X-ray microanalysis
*ALUMINUM crystals
*CRYSTALLOGRAPHY
Subjects
Details
- Language :
- English
- ISSN :
- 0094243X
- Volume :
- 507
- Issue :
- 1
- Database :
- Academic Search Index
- Journal :
- AIP Conference Proceedings
- Publication Type :
- Conference
- Accession number :
- 5664417