Surface stress measurement with interference microscopy of thick homoepitaxial single-crystal diamond layers

MLA

Feng, Z. B., et al. “Surface Stress Measurement with Interference Microscopy of Thick Homoepitaxial Single-Crystal Diamond Layers.” Diamond & Related Materials, vol. 19, no. 12, Dec. 2010, pp. 1453–56. EBSCOhost, https://doi.org/10.1016/j.diamond.2010.08.008.

APA

Feng, Z. B., Chayahara, A., Yamada, H., Mokuno, Y., Tsubouchi, N., & Shikata, S. (2010). Surface stress measurement with interference microscopy of thick homoepitaxial single-crystal diamond layers. Diamond & Related Materials, 19(12), 1453–1456. https://doi.org/10.1016/j.diamond.2010.08.008

Chicago

Feng, Z.B., A. Chayahara, H. Yamada, Y. Mokuno, N. Tsubouchi, and S. Shikata. 2010. “Surface Stress Measurement with Interference Microscopy of Thick Homoepitaxial Single-Crystal Diamond Layers.” Diamond & Related Materials 19 (12): 1453–56. doi:10.1016/j.diamond.2010.08.008.