Back to Search Start Over

Nonchemically amplified resists possessing cholate moiety for micropatterning of biomolecules

Authors :
Ganesan, Ramakrishnan
Kim, Jin-Baek
Source :
Microelectronic Engineering. Jan2011, Vol. 88 Issue 1, p93-98. 6p.
Publication Year :
2011

Abstract

Abstract: Two novel monomers, containing diazoketo functional groups, cholic acid 3-diazo-3-ethoxycarbonyl-2-oxo-propyl ester methacrylate (CDEOPE-MA) and 2-diazo-6-hydroxy-3-oxo-hexanoic acid ethyl ester methacrylate (DHOHEE-MA), were designed and synthesized for biomolecular patterning applications. The polymers were synthesized by radical copolymerization of CDEOPE-MA, DHOHEE-MA, and γ-butyrolacton-2-yl methacrylate. The patternability of the synthesized photoresist polymers were characterized by their lithographic evaluation. Introduction of cholate-monomer (CDEOPE-MA) seems to enhance the film formability as well as film stability in aqueous medium. DNA oligonucleotide patterning study was performed to demonstrate the applicability of this system for biomolecular patterning. [Copyright &y& Elsevier]

Details

Language :
English
ISSN :
01679317
Volume :
88
Issue :
1
Database :
Academic Search Index
Journal :
Microelectronic Engineering
Publication Type :
Academic Journal
Accession number :
54605542
Full Text :
https://doi.org/10.1016/j.mee.2010.09.002