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Nonchemically amplified resists possessing cholate moiety for micropatterning of biomolecules
- Source :
-
Microelectronic Engineering . Jan2011, Vol. 88 Issue 1, p93-98. 6p. - Publication Year :
- 2011
-
Abstract
- Abstract: Two novel monomers, containing diazoketo functional groups, cholic acid 3-diazo-3-ethoxycarbonyl-2-oxo-propyl ester methacrylate (CDEOPE-MA) and 2-diazo-6-hydroxy-3-oxo-hexanoic acid ethyl ester methacrylate (DHOHEE-MA), were designed and synthesized for biomolecular patterning applications. The polymers were synthesized by radical copolymerization of CDEOPE-MA, DHOHEE-MA, and γ-butyrolacton-2-yl methacrylate. The patternability of the synthesized photoresist polymers were characterized by their lithographic evaluation. Introduction of cholate-monomer (CDEOPE-MA) seems to enhance the film formability as well as film stability in aqueous medium. DNA oligonucleotide patterning study was performed to demonstrate the applicability of this system for biomolecular patterning. [Copyright &y& Elsevier]
Details
- Language :
- English
- ISSN :
- 01679317
- Volume :
- 88
- Issue :
- 1
- Database :
- Academic Search Index
- Journal :
- Microelectronic Engineering
- Publication Type :
- Academic Journal
- Accession number :
- 54605542
- Full Text :
- https://doi.org/10.1016/j.mee.2010.09.002