The effect of interface on the electrical properties of (Ba, Sr)TiO[sub 3] adopting the perovskite electrodes.

Perovskite type conducting materials (Ca, Sr)RuO[sub 3] and (Ba, Sr)RuO[sub 3] were prepared by rf magnetron sputtering as bottom electrodes for (Ba, Sr)TiO[sub 3] thin film capacitors. The crystallinity, interface property, and electrical properties of the (Ba, Sr)TiO[sub 3] capacitor applying the perovskite oxide electrodes were investigated. The interface between the dielectric and the electrode were analyzed by high-resolution electron microscopy and Auger electron spectroscopy. The interface had a marked effect on the electrical properties of the (Ba, Sr)TiO[sub 3] thin films. Dielectric constant for the (Ba, Sr)TiO[sub 3] had considerable dependence on the thickness of interfacial layer. The leakage current density of the capacitor was sensitive not only to the structural match but also to the chemical match between (Ba, Sr)TiO[sub 3] and the electrode. © 2000 American Institute of Physics. [ABSTRACT FROM AUTHOR]