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Bio/chemical detection in liquid with self-sensing Pr-Oxi-Lever (piezo-resistive SiO2 cantilever) sensors
- Source :
-
Microelectronic Engineering . Dec2010, Vol. 87 Issue 12, p2468-2474. 7p. - Publication Year :
- 2010
-
Abstract
- Abstract: The paper presents a self-sensing microcantilever for bio/chemical detection in liquid. The developed silicon piezoresistance encapsulated SiO2 cantilever (Pr-Oxi-Lever) is with the electric interconnection wires insulated by a SU-8 coating layer for specifically detecting bio/chemical molecules in liquid environment. Functionalized with specific sensing terminals, siloxane-based molecule layer is directly modified on the cantilever SiO2 surface via reliable Si–O covalent bond. Instead of the previously used thiol self-assembly molecule layers that show long-term instability, the modified siloxane sensing layer secures long-term sensitivity stability and long working life. The sensors have been successfully used for detection of 2.5% aqueous tetramethylammonium hydroxide (TMAH) and avidin at 10−11 mol/mL trace level. An interesting phenomenon of opposite surface-stress sensing signals for different-sized target-molecules is experimentally observed. A simple model is proposed for preliminary explanation of this phenomenon. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 01679317
- Volume :
- 87
- Issue :
- 12
- Database :
- Academic Search Index
- Journal :
- Microelectronic Engineering
- Publication Type :
- Academic Journal
- Accession number :
- 53332694
- Full Text :
- https://doi.org/10.1016/j.mee.2010.05.001