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FEI eyes 3D structures with intergated SEM/FIB platform.

Authors :
D. V.
Source :
Solid State Technology. Jun2010, Vol. 53 Issue 6, p16-16. 1/2p.
Publication Year :
2010

Abstract

The article evaluates the Helios NanoLabx50 DualBeam Series 450(S) and 650 structures for the integration of extreme high-resolution scanning electron microscope (XHR SEM) from Fei Co.

Subjects

Subjects :
*SCANNING electron microscopes
*EVALUATION

Details

Language :
English
ISSN :
0038111X
Volume :
53
Issue :
6
Database :
Academic Search Index
Journal :
Solid State Technology
Publication Type :
Academic Journal
Accession number :
51705889

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