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Development of fine-particle plasma systems for basic and applied research.
- Source :
-
Plasma Sources Science & Technology . Jun2010, Vol. 19 Issue 3, p034019-034019. 1p. - Publication Year :
- 2010
-
Abstract
- Two plasma systems for basic and applied research on fine-particle plasmas have been developed. One is a planar-magnetron plasma system, by which fine particles are suspended apart from the region of plasma production and are driven upward, for the basic research of fine-particle plasmas. Fine particles are observed to be horizontally arranged even when they have a size of 6.5 um. The other one is a hot-filament-assisted plasma chemical vapor deposition system for nano-carbon synthesis. Synthesis processes have been analyzed by mass spectroscopy, light scattering and self-bias voltage. It was shown that negatively charged carbon fine particles were confined for a long time in plasmas during generation and growth. Synthesized carbon fine particles were confirmed to contain single-walled carbon nanotubes by analyzing the results of Raman spectroscopy and transmission electron microscopy. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 09630252
- Volume :
- 19
- Issue :
- 3
- Database :
- Academic Search Index
- Journal :
- Plasma Sources Science & Technology
- Publication Type :
- Academic Journal
- Accession number :
- 51133930
- Full Text :
- https://doi.org/10.1088/0963-0252/19/3/034019