Back to Search
Start Over
A dynamic collision model for improved over-range protection of cantilever-mass micromechanical accelerometers
- Source :
-
Microelectronics Journal . Jun2010, Vol. 41 Issue 6, p331-337. 7p. - Publication Year :
- 2010
-
Abstract
- Abstract: A dynamic collision model is proposed and built to analyze over-range protection of cantilever beam–mass structured micro-accelerometers. The model encloses angular momentum of the seismic mass, squeeze-film air damping, inertial force and supporting force (acting at the cantilever-root) during the collision between the seismic mass and the over-range stopping bumpers. Based on angular momentum balance equation we obtain the relationship among the supporting force F, the collision time duration t and the rotation center c where the bumpers are located. In the best case of F=0 which means no supporting force acts on the cantilever, we find the optimal bumper location of c. The accelerometers have been fabricated with the over-range protection design according to the dynamic collision model. Experimental test shows that 5g measure-range accelerometers can endure 9000g acceleration and there is no sign of performance degradation, which well verified the dynamic collision model. [Copyright &y& Elsevier]
Details
- Language :
- English
- ISSN :
- 00262692
- Volume :
- 41
- Issue :
- 6
- Database :
- Academic Search Index
- Journal :
- Microelectronics Journal
- Publication Type :
- Academic Journal
- Accession number :
- 50972482
- Full Text :
- https://doi.org/10.1016/j.mejo.2010.04.002