Nanofilms based on zirconia and ceria.

Nanofilms based on zirconia and ceria have been synthesized using the electron-beam evaporation method. It has been established that their composition involves a tetragonal solid solution based on zirconia and weakly crystallized α-Al2O3 (corundum). The quantitative information concerning the morphology of oxide nanofilms has been obtained. It has been revealed that the films have a developed surface. The prepared films can be proposed for the use as resistive sensor chips intended for determining PO 2 in different media. [ABSTRACT FROM AUTHOR]