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Wet thermal oxidation of AlAsSb alloys lattice matched to InP.
- Source :
-
Journal of Applied Physics . 6/1/1997, Vol. 81 Issue 11, p7600. 4p. - Publication Year :
- 1997
-
Abstract
- Wet thermal oxidation of AlAsSb was investigated. The oxidation kinetics was studied as a function of temperature and oxidation duration. An expression to allow accurate determination of the oxide depth for any temperature and time was established. Secondary ion mass spectrometry profiles and x-ray diffraction were used to demonstrate that an interfacial layer, composed of pure Sb and As and textured on InP, is formed during the oxidation process. [ABSTRACT FROM AUTHOR]
- Subjects :
- *ALLOYS
*OXIDATION
Subjects
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 81
- Issue :
- 11
- Database :
- Academic Search Index
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- 4870405
- Full Text :
- https://doi.org/10.1063/1.365335