Back to Search
Start Over
BST FILMS GROWN BY METAL ORGANIC CHEMICAL VAPOR DEPOSITION INCORPORATING REAL-TIME CONTROL OF STOICHIOMETRY.
- Source :
-
Integrated Ferroelectrics . 2009, Vol. 111 Issue 1, p17-26. 10p. 3 Black and White Photographs, 5 Charts, 4 Graphs. - Publication Year :
- 2009
-
Abstract
- We present preliminary results of metal organic chemical vapor deposition (MOCVD) growth of BaxSr1-xTiO3 (BST) thin films. Films were deposited on MgO, sapphire, Si, and Si/Pt/Ti substrates. Real-time monitoring of the precursor flux by UV absorption spectroscopy was used to control the composition of the films over the range 30 ≤ x ≤ 80. The films were characterized for a number of attributes including composition, crystalline structure, and morphology. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 10584587
- Volume :
- 111
- Issue :
- 1
- Database :
- Academic Search Index
- Journal :
- Integrated Ferroelectrics
- Publication Type :
- Academic Journal
- Accession number :
- 48675416
- Full Text :
- https://doi.org/10.1080/10584580903586638