A hybrid-type electrostatically driven microgripper with an integrated vacuum tool

Abstract: Reliable and accurate pick and release of microobjects is a long-standing challenge at the microscale manipulation field. This paper presents a new hybrid type of microelectromechanical systems (MEMS) microgripper integrated with an electrostatic mechanism and vacuum technology to achieve a reliable and accurate manipulation of microobjects. The microgripper is fabricated by a surface and bulk micromachining technology. Vacuum pipelines are constructed by bonding technique. The pick and release micromanipulation of microobjects is accomplished by electrostatic driving force caused by comb structure and an auxiliary air pressure force from air pump. A deflection of 25μm at the tip of the gripper is achieved with the applied voltage of 80V. The performance of this new hybrid type of microgripper was experimentally demonstrated through the manipulation of 100–200μm polystyrene balls. Experimental results show that this microgripper can successfully fulfil the pick and release micromanipulation. Theoretical analyses were conducted to have a more comprehensive understanding of the release principle. Based on this paper, the new kind of hybrid microgripper will possibly provide an effective solution to the manipulation of submicrometer-sized objects. [Copyright &y& Elsevier]