Fe diffusion, oxidation, and reduction at the CoFeB/MgO interface studied by soft x-ray absorption spectroscopy and magnetic circular dichroism.

We have studied the effect of annealing on the interface magnetization in a CoFeB/MgO structure which models the lower electrode in a magnetic tunnel junction device. We find that MgO deposition causes Fe to diffuse toward the CoFeB/MgO interface, where it preferentially bonds with oxygen to form a Fe-O-rich interfacial region with reduced magnetization. After annealing at 375 °C the compositional inhomogeneity remains; Fe is reduced back to a ferromagnetic metallic state and the full interfacial magnetization is regained. [ABSTRACT FROM AUTHOR]