Surface characterization of poly(methylmethacrylate) based nanocomposite thin films containing Al2O3 and TiO2 nanoparticles

Abstract: Poly(methylmethacrylate) (PMMA) based nanocomposite electron beam resists have been demonstrated by spin coating techniques. When TiO2 and Al2O3 nanoparticles were directly dispersed into the PMMA polymer matrix, the resulting nanocomposites produced poor quality films with surface roughnesses of 322 and 402nm respectively. To improve the surface of the resists, the oxide nanoparticles were encapsulated in toluene and methanol. Using the zeta potential parameter, it was found that the stabilities of the toluene/oxide nanoparticle suspensions were 7.7mV and 19.4mV respectively, meaning that the suspension was not stable. However, when the TiO2 and Al2O3 nanoparticles were encapsulated in methanol the zeta potential parameter was 31.9mV and 39.2mV respectively. Therefore, the nanoparticle suspension was stable. This method improved the surface roughness of PMMA based nanocomposite thin films by a factor of 6.6 and 6.4, when TiO2 and Al2O3 were suspended in methanol before being dispersed into the PMMA polymer. [Copyright &y& Elsevier]