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Direct fabrication of nanopores in a metal foil using focused ion beam with in situ measurements of the penetrating ion beam current.
- Source :
-
Review of Scientific Instruments . Dec2009, Vol. 80 Issue 12, p125102. 4p. 3 Diagrams, 2 Graphs. - Publication Year :
- 2009
-
Abstract
- A through hole with a diameter less than 100 nm was fabricated in an Ag foil using only a focused ion beam (FIB) system and in situ measurements of the penetrating ion beam. During the drilling of the foil by a FIB of Ga+ ions, the transmitted part of the beam was measured with an electrode mounted on the back face of the foil. When the beam current penetrating through the nanopore reached a certain value, irradiation was stopped and the area of the created aperture was measured with a scanning electron microscope. The resulting area was correlated with the current of the penetrating ion beam. This suggests that we can fabricate a nanopore of the desired size by controlling the ion beam via penetrating ion beam measurements. The smallest aperture thus created was circular with diameter of 30 nm. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 00346748
- Volume :
- 80
- Issue :
- 12
- Database :
- Academic Search Index
- Journal :
- Review of Scientific Instruments
- Publication Type :
- Academic Journal
- Accession number :
- 47244395
- Full Text :
- https://doi.org/10.1063/1.3270958