Structural characterization of TiN coatings on Si substrates irradiated with Ar ions

MLA

Popović, M., et al. “Structural Characterization of TiN Coatings on Si Substrates Irradiated with Ar Ions.” Materials Characterization, vol. 60, no. 12, Dec. 2009, pp. 1463–70. EBSCOhost, https://doi.org/10.1016/j.matchar.2009.07.002.

APA

Popović, M., Novaković, M., & Bibić, N. (2009). Structural characterization of TiN coatings on Si substrates irradiated with Ar ions. Materials Characterization, 60(12), 1463–1470. https://doi.org/10.1016/j.matchar.2009.07.002

Chicago

Popović, M., M. Novaković, and N. Bibić. 2009. “Structural Characterization of TiN Coatings on Si Substrates Irradiated with Ar Ions.” Materials Characterization 60 (12): 1463–70. doi:10.1016/j.matchar.2009.07.002.