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A Small-Displacement Sensor Using Total Internal Reflection Theory and Surface Plasmon Resonance Technology for Heterodyne Interferometry.
- Source :
-
Sensors (14248220) . 2009, Vol. 9 Issue 4, p2498-2510. 13p. 6 Diagrams, 5 Graphs. - Publication Year :
- 2009
-
Abstract
- A small-displacement sensor based on total-internal reflection theory and surface plasmon resonance technology is proposed for use in heterodyne interferometry. A small displacement can be obtained simply by measuring the variation in phase difference between s- and p-polarization states with the small-displacement sensor. The theoretical displacement resolution of the small-displacement sensor can reach 0.45 nm. The sensor has some additional advantages, e.g., a simple optical setup, high resolution, high sensitivity and rapid measurement. Its feasibility is also demonstrated. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 14248220
- Volume :
- 9
- Issue :
- 4
- Database :
- Academic Search Index
- Journal :
- Sensors (14248220)
- Publication Type :
- Academic Journal
- Accession number :
- 43934163
- Full Text :
- https://doi.org/10.3390/s90402498