Back to Search Start Over

Two-Laser Lithography Shrinks Transistors on the Cheap.

Authors :
Das, Saswato R.
Source :
IEEE Spectrum. Jun2009, Vol. 46 Issue 6, p16-16. 3/4p. 1 Color Photograph.
Publication Year :
2009

Abstract

The article offers information on other uses of optical lithography. It relates that the stimulated emission depletion (STED), a work by Stefan Hell at the Max Planck Institute for Biophysical Chemistry in Göttingen, Germany, has inspired the development of other approaches of optical litography. These approaches include photolithography by Rajesh Menon and colleagues, photoresists, and two-laser lithography by John Fourkas and colleagues.

Details

Language :
English
ISSN :
00189235
Volume :
46
Issue :
6
Database :
Academic Search Index
Journal :
IEEE Spectrum
Publication Type :
Periodical
Accession number :
43573069
Full Text :
https://doi.org/10.1109/MSPEC.2009.4977597