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Construction of a system for novel low-temperature growth of II-VI compound semiconductors using...

Authors :
Ogata, Toshihiro
Ikejiri, Makoto
Gheyas, Syed Irfan
Ogawa, Hiroshi
Nishio, Mitsuhiro
Source :
Review of Scientific Instruments. Feb1995, Vol. 66 Issue 2, p1086. 4p. 2 Black and White Photographs, 4 Diagrams, 4 Graphs.
Publication Year :
1995

Abstract

Describes a synchrotron radiation-based growth technique for the II-VI compound semiconductors. Reaction chamber and load-lock chamber of the experimental system; Gas delivery system; Exhaust system; Deposition of zinc telluride in a continuous gas flow.

Details

Language :
English
ISSN :
00346748
Volume :
66
Issue :
2
Database :
Academic Search Index
Journal :
Review of Scientific Instruments
Publication Type :
Academic Journal
Accession number :
4330970
Full Text :
https://doi.org/10.1063/1.1146051