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Effect of superlattice layer elastic moduli on hardness.

Authors :
Shinn, M.
Barnett, S.A.
Source :
Applied Physics Letters. 1/3/1994, Vol. 64 Issue 1, p61. 3p. 1 Chart, 3 Graphs.
Publication Year :
1994

Abstract

Examines the structure and hardness of epitaxial V[sub 0.6]Nb[sub 0.4]N/NbN superlattices. Deposition of the superlattices on magnesium oxide(100) by reactive sputtering; Assessment of the superlattice composition modulation; Measurement of titanium nitride/niobium nitride samples.

Subjects

Subjects :
*SUPERLATTICES
*EPITAXY
*SPUTTERING (Physics)

Details

Language :
English
ISSN :
00036951
Volume :
64
Issue :
1
Database :
Academic Search Index
Journal :
Applied Physics Letters
Publication Type :
Academic Journal
Accession number :
4319356
Full Text :
https://doi.org/10.1063/1.110922
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