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Calcium fluoride thin films on GaAs(100) for possible metal-insulator-semiconductor applications.
- Source :
-
Applied Physics Letters . 2/22/1993, Vol. 62 Issue 8, p852. 3p. 2 Black and White Photographs, 3 Graphs. - Publication Year :
- 1993
-
Abstract
- Investigates the effects of the deposition and annealing conditions on the physical and electrical properties of calcium fluoride thin films. Deposition of the thin film on gallium arsenide substrate by thermal evaporation; Improvement of the interfacial electrical properties; Possibility for metal-insulator-semiconductor application.
- Subjects :
- *THIN films
*ANNEALING of crystals
Subjects
Details
- Language :
- English
- ISSN :
- 00036951
- Volume :
- 62
- Issue :
- 8
- Database :
- Academic Search Index
- Journal :
- Applied Physics Letters
- Publication Type :
- Academic Journal
- Accession number :
- 4319222
- Full Text :
- https://doi.org/10.1063/1.108545