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Beam focusing of low-energy ion source by aperture displacement.
- Source :
-
Review of Scientific Instruments . Jun95, Vol. 66 Issue 6, p3443. 5p. 6 Diagrams, 7 Graphs. - Publication Year :
- 1995
-
Abstract
- Describes how a narrow gap and high deceleration voltage affects the deflection angle and the beam characteristics for the geometrical focusing of a low-energy ion source by an aperture displacement technique. Two-dimensional power density profiles; Focal length and other beam characteristics; Analytical formula of steering angle.
- Subjects :
- *ION bombardment
*ION sources
*GEOMETRICAL optics
Subjects
Details
- Language :
- English
- ISSN :
- 00346748
- Volume :
- 66
- Issue :
- 6
- Database :
- Academic Search Index
- Journal :
- Review of Scientific Instruments
- Publication Type :
- Academic Journal
- Accession number :
- 4301718
- Full Text :
- https://doi.org/10.1063/1.1145520