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Synthesis of CuO films using mass-separated, low-energy O[sup +] ion beams.
- Source :
-
Applied Physics Letters . 5/25/1992, Vol. 60 Issue 21, p2684. 2p. 1 Diagram, 2 Graphs. - Publication Year :
- 1992
-
Abstract
- Examines the molecular beam epitaxy technique for growing oxides using low-energy and high-density oxygen-ion beams. Simultaneous deposition of copper metal on magnesium oxide(100); Potential of oxygen beams for oxidation; Formation of copper oxide.
- Subjects :
- *MOLECULAR beam epitaxy
*ION bombardment
*CHEMICAL vapor deposition
Subjects
Details
- Language :
- English
- ISSN :
- 00036951
- Volume :
- 60
- Issue :
- 21
- Database :
- Academic Search Index
- Journal :
- Applied Physics Letters
- Publication Type :
- Academic Journal
- Accession number :
- 4293954
- Full Text :
- https://doi.org/10.1063/1.106895