Growth of YBa[sub 2]Cu[sub 3]O[sub 7-delta] in pure ozone irradiated with ultraviolet light.

Demonstrates the growth of YBa[sub 2]Cu[sub 3]O[sub 7-delta] thin films in pure ozone. Application of molecular beam epitaxy; Efficiency of the thermally driven ozone-oxidation process; Enhancement of pure-ozone oxidation by ultraviolet irradiation; Extension of thin film stability limit to lower growth pressures.