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Atomic force microscope using piezoresistive cantilevers and combined with a scanning electron....
- Source :
-
Applied Physics Letters . 11/28/1994, Vol. 65 Issue 22, p2878. 3p. 7 Black and White Photographs, 1 Diagram, 1 Graph. - Publication Year :
- 1994
-
Abstract
- Examines the use of piezoresistive cantilevers with an atomic force microscope operating with a scanning electron microscope. Compatibility of the microscopes; Presentation of grating and integrated circuit images; Methods for the detection of lever deflection.
- Subjects :
- *ATOMIC force microscopy
*SCANNING electron microscopes
*INTEGRATED circuits
Subjects
Details
- Language :
- English
- ISSN :
- 00036951
- Volume :
- 65
- Issue :
- 22
- Database :
- Academic Search Index
- Journal :
- Applied Physics Letters
- Publication Type :
- Academic Journal
- Accession number :
- 4233224
- Full Text :
- https://doi.org/10.1063/1.113030