Formation of p[sup +]n junctions by Si[sup +]+B[sup +] implantation and laser annealing.

MLA

Juang, M. H., and H. C. Cheng. “Formation of p[Sup +]n Junctions by Si[Sup +]+B[Sup +] Implantation and Laser Annealing.” Applied Physics Letters, vol. 60, no. 17, Apr. 1992, p. 2092. EBSCOhost, https://doi.org/10.1063/1.107099.

APA

Juang, M. H., & Cheng, H. C. (1992). Formation of p[sup +]n junctions by Si[sup +]+B[sup +] implantation and laser annealing. Applied Physics Letters, 60(17), 2092. https://doi.org/10.1063/1.107099

Chicago

Juang, M.H., and H.C. Cheng. 1992. “Formation of p[Sup +]n Junctions by Si[Sup +]+B[Sup +] Implantation and Laser Annealing.” Applied Physics Letters 60 (17): 2092. doi:10.1063/1.107099.