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A new technique for diagnostics of a radio-frequency parallel-plate remote plasma.
- Source :
-
Applied Physics Letters . 7/11/1994, Vol. 65 Issue 2, p162. 3p. 1 Diagram, 5 Graphs. - Publication Year :
- 1994
-
Abstract
- Develops a parallel-plate remote plasma reactor containing a metal grid between the powered and the grounded electrode. Measurement of the plasma parameters in radio frequency argon plasmas; Ranges of the electron density; Demonstration of the effective plasma confinement; Approximation of the electron energy distribution function.
- Subjects :
- *PLASMA dynamics
*ELECTRODES
*RADIO frequency
Subjects
Details
- Language :
- English
- ISSN :
- 00036951
- Volume :
- 65
- Issue :
- 2
- Database :
- Academic Search Index
- Journal :
- Applied Physics Letters
- Publication Type :
- Academic Journal
- Accession number :
- 4227607
- Full Text :
- https://doi.org/10.1063/1.112659